APPLICATION NOTE II(영문)

12 WINDOW TO THE NANO WORLD with COXEM SEM is designed to detect and analyze signals to obtain different types of images generated by electrons – being projected at an extremely fast speed - colliding with the sample. In this process, if an excessive portion of electrons remain on the specimen, there will be a ‘Charging effect’ which has a negative effect on the image. To prevent such an effect, you must use an ‘Ion sputter coater’ to cover the sample’s surface with a thin conductive layer. 1) Effect of Coating To observe a fine structure of a specimen, it is required to use chemical etching. 2) Chemical Etching Effect A polishing process can be applied to any sample whose surface is not smooth - such as a semi-conductor chip section or a grain boundary in metal – for accurate observation. 3) Polishing <Paper> <Metal> Before coating Before Metal Etching Solder Ball Molding After coating After Metal Etching Rock Molding Ion Sputter Coater (SPT-20) 8. Effect of Sample Preparation INTRODUCTION For SEM, it is not necessary to prepare a special preparation for the sample, and there are only few limitations for samples, which make it highly useful. However, it is better to, identify the sample’s conductivity or contamination before processing a pretreatment to obtain a higher-quality image of the sample.