APPLICATION NOTE II(영문)

23 www.coxem.com Specifications Items / Model EM-30 EM-30AX CX-200Plus Resolution SE 5.0 nm at 30 kV 3.0 nm at 30 kV Magnification x15 ~ x150,000 x15 ~ x300,000 Accelerating Voltage 1 ~ 30 kV Vacuum Mode High Vacuum - Low Vacuum (Optional) EDS Integrated (Optional) Integrated (Standard) External (Optional) Maximum Specimen Size 60 mm in diameter 160 mm in diameter Stage 3-Axes Motorized 5-Axes (Motorized) X 0~35 mm 0~40 mm Y 0~35 mm 0~60 mm T 0~45 -20~90 Z 5~50 mm (Manual) 5~60 mm R 360 (Raster) 360 Observation Area 40 mm in diameter 110 mm in diameter Maximum Height 45 mm 55 mm Electron Gun Pre-centered Cartridge Source Tungsten Detector SE SE BSE(Optional) BSE Control Mouse Mouse Keyboard Keyboard Joystick Joystick Auto lmage Adjustment Auto Focus Auto Brightness & Contrast Auto Filament Auto Start Special Features Multiple Sample Holder Panorama Shot Dual Display(SE/BSE) Signal Mixing(SE+BSE) Line Profile Image Processing Measuring tool Remote Access Navigation View CCD Camera Options EDS - EDS BSED Low Vacuum Cool Stage Cool Stage