APPLICATION NOTE II(영문)

04 WINDOW TO THE NANO WORLD with COXEM 2. Effect of High Resolution Operation A higher resolution is useful when observing minute parts of objects, such as materials or components. Analysis Solution for: - Chemistry Industries - Semiconductors and Electronics Industries - Material Industries - EM-30 Series - CX-200Plus Benefits Availability Nano Tube (100k) Silicon Wafer (50k) Silicon Wafer (50k) Nano Tube (100k) Ceramic (100k) Gold Particles (100k) It is possible to obtain a higher resolution image by setting the WD and electron beam’s size to be short and small, while setting the accelerating voltage to be high. INTRODUCTION One of the greatest advantages of SEMs is that they use an electron beam with a short wavelength to ensure observation of an image in a higher magnification. SEM is particularly effective in obtaining a high resolution by adjusting accelerating voltage, working distance (WD), and electron beam’s size(so called ‘Spot Size’).