종합 카달로그-영문

CX series Model CX-200K CX-300 Electron gun Tungsten filament (W) Tungsten filament (W) Spatial resolution < 3nm < 3nm Photo magnification 6x to 300,000x 6x to 300,000x Display magnification 9x to 500,000x 9x to 500,000x Accelerating voltage 1 ~ 30kV 1 ~ 30kV Sample stage X : 60mm, Y : 60mm, Z : 60mm, R : 360, T : -20 ~ 90° X : 100 mm, Y : 100mm, Z : 60mm, R : 360, T : -20 ~ 90° Detector SE, BSE SE, BSE Vacuummode HV, LV(20Pa)*, VP(10, 20, 30Pa)* HV, LV(20Pa)*, VP(10, 20, 30Pa)* Vacuum system Turbo pump (80L) + Rotary pump (100L) Turbo pump (80L) + Rotary pump (100L) Dimension 640(W) ×682(L) ×1,432(H)mm, 200kg 640(W) × 690(L) × 1,460(H)mm, 200kg Features Panorama v2 Panorama v2 Auto focus Auto focus Auto brightness & contrast 1 Second auto brightness & contrast Auto start Auto start Signal mixing Signal mixing Triple display & Save Quad display & Save Line profile Line profile Image filtering Image filtering Annotation tool Annotation tool ChamberCam ChamberCam Data output format JPEG, TIFF, BMP JPEG, TIFF, BMP Options* EBSD, STEM EBSD, STEM Coolstage NaviCam, Coolstage LV(20Pa), VP(10 / 20 / 30Pa) LV(20Pa), VP(10 / 20 / 30Pa) NanofiberScanner NanofiberScanner Scroll pump Scroll pump 12 13 www.coxem.com