종합 카달로그-영문

Model EM-30N EM-40 Electron gun Tungsten filament (W) Tungsten filament (W) Spatial resolution < 5nm < 5nm Photo magnification 15x to 150,000x 8x to 150,000x Display magnification 15x to 150,000x 13x to 250,000x Accelerating voltage 1 ~ 30kV 1 ~ 30kV Sample stage X : 35mm, Y : 35mm, Tilt : 0 ~ 45° X : 40mm, Y : 40mm, Z : 40mm, 3-axis motorized Detector SE, BSE* SE, BSE* Vacuummode HV, LV* HV, LV*, VP* Vacuum system Turbo pump (80L) + Rotary pump (100L) Turbo pump (80L) + Rotary pump (100L) Dimension 400(W) × 630(L) × 600(H)mm, 85kg 315(W) × 560(L) × 580(H)mm, 81.5kg Features Panorama v1 Panorama v2 Auto focus Auto focus Auto brightness & contrast 1 Second auto brightness & contrast Auto start Auto start Signal mixing Signal mixing Dual display & Save Triple display & Save Line profile Line profile Image filtering Image filtering Annotation tool Annotation tool ChamberCam ChamberCam Data output format JPEG, TIFF, BMP JPEG, TIFF, BMP Options* BSE, EDS, EBSD, STEM BSE, EDS, EBSD, STEM NaviCam, Coolstage NaviCam, Coolstage LV (20Pa) LV (20Pa), VP (10 / 20 / 30Pa) Panorama v2, NanofiberScanner NanofiberScanner Diaphragm pump Diaphragm pump EM series 8 9 www.coxem.com